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[Features]
· Convenient for adsorption of green sheet, polyimide film, light/soft materials and thin materials.
· It is a porous ceramics adsorption table.
· The average pore diameter is 55 μm, which is smaller than the hole diameter made by machining, reducing the amount of distortion of the adsorbate.
· There is no need to worry about dust generated within the ceramic.
· It is made of ceramic and SUS, providing high rust resistance.
· Clogging and chipping of ceramic can be repaired as well
N(mm) | 4 | Material | Upper surface: alumina ceramics base: SUS303 | Specification 1 | Average porosity: 30-35% |
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Specification 2 | Average pore diameter: 55 μm |
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