Wafer-Carrier Mounting Photomicrosensors [EE-SPY801/802]

Photomicrosensor for detecting wafer-carrier mounting.
[Features]
· The mounting position is set together with a guide.
· The contact surface with the wafer-carrier uses fluororesin with excellent chemical resistance.
· The unique optical system enables stable detection of almost all wafer-carriers.
· Light modulation effectively reduces external light interference.
· Utilizes clean cable (talc-free).