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Small vacuum pad ideal for use in semiconductor manufacturing equipment, *CAD data currently being revised for this series. This will be available as soon as modifications are complete.
Model code | Tube O.D. øD | Pad O.D. ød | B | L | Tube end C | E | Connection config. code |
---|---|---|---|---|---|---|---|
VPMB0.7RM[5]-180J | 1.8 | 0.7 | 15 | 4 | 8.4 | 12 | -T4 |
VPMB0.7RM[5]-4J[9] | 4 | 10.9 | 15 | ||||
VPMB1RM[5]-180J | 1.8 | 1 | 8.4 | 12 | |||
VPMB1RM[5]-4J[9] | 4 | 10.9 | 15 | ||||
VPMB1.5RM[5]-180J | 1.8 | 1.5 | 8.4 | 12 | |||
VPMB1.5RM[5]-4J[9] | 4 | 10.9 | 15 | ||||
VPMB2RM[5]-180J | 1.8 | 2 | 8.4 | 12 | |||
VPMB2RM[5]-4J[9] | 4 | 10.9 | 15 | ||||
VPMB3RM[5]-180J | 1.8 | 3 | 8.4 | 12 | |||
VPMB3RM[5]-4J[9] | 4 | 10.9 | 15 | ||||
VPMB4RM[5]-180J | 1.8 | 4 | 8.4 | 12 | |||
VPMB4RM[5]-4J[9] | 4 | 10.9 | 15 | ||||
VPMB6R[5]-180J | 1.8 | 6 | 19.5 | 7 | 8.4 | 12.5 | -T8 |
VPMB6RM[5]-4J[9] | 4 | 10.9 | 15.5 | ||||
VPMB8R[5]-180J | 1.8 | 8 | 18 | 5.5 | 8.4 | 12.5 | |
VPMB8RM[5]-4J[9] | 4 | 10.9 | 15.5 | ||||
VPMB10R[5]-180J | 1.8 | 10 | 27 | 8 | 8.4 | 13.7 | -M4 |
VPMB10R[5]-4J[9] | 4 | 10.9 | 17.5 | ||||
VPMB15R(A)[5]-180J | 1.8 | 15 | 28(29) | 9(10) | 8.4 | 13.7 | |
VPMB15R(A)[5]-4J[9] | 4 | 10.9 | 17.5 | ||||
VPMB20R(A)[5]-180J | 1.8 | 20 | 31.2(32.2) | 10(11) | 8.4 | 13.7 | -M6 |
VPMB20R(A)[5]-4J[9] | 4 | 10.9 | 17.5 | ||||
VPMB25R(A)[5]-180J | 1.8 | 25 | 32.2(33.2) | 11(12) | 8.4 | 13.7 | |
VPMB25R(A)[5]-4J[9] | 4 | 10.9 | 17.5 | ||||
VPMB30R(A)[5]-180J | 1.8 | 30 | 32.2(35.2) | 11(14) | 8.4 | 13.7 | |
VPMB30R(A)[5]-4J[9] | 4 | 10.9 | 17.5 | ||||
VPMB40R(A)[5]-180J | 1.8 | 40 | 35.2(38.7) | 14(17.5) | 8.4 | 13.7 | |
VPMB40R(A)[5]-4J[9] | 4 | 10.9 | 17.5 | ||||
VPMB50R(A)[5]-180J | 1.8 | 50 | 36.2(39.2) | 15(18) | 8.4 | 13.7 | |
VPMB50R(A)[5]-4J[9] | 4 | 10.9 | 17.5 |
Units: mm
*Value in ( ) is the dimension of a deep type pad.
*[5]: Replaced with Pad rubber material code. Refer to the catalog for details.
*[9]: Replaced with "-S3" for -S3 spec. (Copper alloy free material for metal parts and FKM or HNBR for sealing parts).
*Pad material N, NE, and G are not suitable for use under ozone environment.
Part Number | Price | Minimum Order Qty. | Volume Discount | Days to Ship | RoHS | Pad Shape | Mounting Method | Rubber Group Material | Environment | Color | Outer Diameter d (φ) | Height L1 (mm) | Full length B (mm) | Mount Connection Screw | Vacuum Outlet Tube Outer Diameter (φ) | Metal parts material |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
₹ 1,374.40 | 1 Piece(s) | 10 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 0.7 | 4 | 15 | M3 × 0.5 | 3 | Standard Specifications | ||
₹ 1,374.40 | 1 Piece(s) | 10 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 0.7 | 4 | 15 | M3 × 0.5 | 1.8 | Standard Specifications | ||
₹ 1,374.40 | 1 Piece(s) | 10 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 1 | 4 | 15 | M3 × 0.5 | 3 | Standard Specifications | ||
₹ 1,374.40 | 1 Piece(s) | 10 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 1 | 4 | 15 | M3 × 0.5 | 1.8 | Standard Specifications | ||
₹ 1,374.40 | 1 Piece(s) | 10 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 1.5 | 4 | 15 | M3 × 0.5 | 3 | Standard Specifications | ||
₹ 1,374.40 | 1 Piece(s) | 10 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 1.5 | 4 | 15 | M3 × 0.5 | 1.8 | Standard Specifications | ||
₹ 1,374.40 | 1 Piece(s) | 10 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 2 | 4 | 15 | M3 × 0.5 | 3 | Standard Specifications | ||
₹ 1,374.40 | 1 Piece(s) | 10 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 2 | 4 | 15 | M3 × 0.5 | 1.8 | Standard Specifications | ||
₹ 1,374.40 | 1 Piece(s) | 10 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 3 | 4 | 15 | M3 × 0.5 | 3 | Standard Specifications | ||
₹ 1,374.40 | 1 Piece(s) | 10 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 3 | 4 | 15 | M3 × 0.5 | 1.8 | Standard Specifications | ||
₹ 1,374.40 | 1 Piece(s) | 10 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 4 | 4 | 15 | M3 × 0.5 | 3 | Standard Specifications | ||
₹ 1,374.40 | 1 Piece(s) | 10 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 4 | 4 | 15 | M3 × 0.5 | 1.8 | Standard Specifications | ||
₹ 1,437.87 | 1 Piece(s) | 10 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 6 | 7 | 19.5 | M4 × 0.7 | 3 | Standard Specifications | ||
₹ 1,437.87 | 1 Piece(s) | 10 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 6 | 7 | 19.5 | M4 × 0.7 | 1.8 | Standard Specifications | ||
₹ 1,488.91 | 1 Piece(s) | 10 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 8 | 5.5 | 18 | M4 × 0.7 | 3 | Standard Specifications | ||
₹ 1,488.91 | 1 Piece(s) | 10 Day(s) or more | - | Small | Recessed Type | Fluorine Rubber | Standard | Gray | 8 | 5.5 | 18 | M4 × 0.7 | 1.8 | Standard Specifications | ||
₹ 1,596.52 | 1 Piece(s) | 10 Day(s) or more | - | Small | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 10 | 8 | 27 | M5 × 0.8 | 3 | Standard Specifications | ||
₹ 1,622.73 | 1 Piece(s) | 10 Day(s) or more | - | Small | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 10 | 8 | 27 | M5 × 0.8 | 4 | Standard Specifications | ||
₹ 2,529.11 | 1 Piece(s) | 11 Day(s) or more | - | Small | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 10 | 8 | 27 | M5 × 0.8 | 4 | Copper-free specification | ||
₹ 1,735.85 | 1 Piece(s) | 10 Day(s) or more | - | Deep Type | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 15 | 10 | 29 | M5 × 0.8 | 3 | Standard Specifications | ||
₹ 1,762.07 | 1 Piece(s) | 10 Day(s) or more | - | Deep Type | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 15 | 10 | 29 | M5 × 0.8 | 4 | Standard Specifications | ||
₹ 1,735.85 | 1 Piece(s) | 10 Day(s) or more | - | Small | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 15 | 9 | 28 | M5 × 0.8 | 3 | Standard Specifications | ||
₹ 1,762.07 | 1 Piece(s) | 10 Day(s) or more | - | Small | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 15 | 9 | 28 | M5 × 0.8 | 4 | Standard Specifications | ||
₹ 1,888.99 | 1 Piece(s) | 10 Day(s) or more | - | Deep Type | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 20 | 11 | 32.2 | M5 × 0.8 | 4 | Standard Specifications | ||
₹ 1,888.99 | 1 Piece(s) | 10 Day(s) or more | - | Small | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 20 | 10 | 31.2 | M5 × 0.8 | 4 | Standard Specifications | ||
₹ 1,888.99 | 1 Piece(s) | 10 Day(s) or more | 10 | Deep Type | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 25 | 12 | 33.2 | M5 × 0.8 | 4 | Standard Specifications | ||
₹ 1,888.99 | 1 Piece(s) | 10 Day(s) or more | - | Small | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 25 | 11 | 32.2 | M5 × 0.8 | 4 | Standard Specifications | ||
₹ 1,888.99 | 1 Piece(s) | 10 Day(s) or more | - | Deep Type | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 30 | 14 | 35.2 | M5 × 0.8 | 4 | Standard Specifications | ||
₹ 1,888.99 | 1 Piece(s) | 10 Day(s) or more | - | Small | Pad Screw Fixed | Fluorine Rubber | Standard | Gray | 30 | 11 | 32.2 | M5 × 0.8 | 4 | Standard Specifications |
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Pad Type | Standard / Holder Set | Material | Rubber-based | Mounting Fitting | Fixed Type |
---|---|---|---|---|---|
Vacuum Outlet Direction | Horizontal | Fall Prevention Valve | None | Direct Attached Filter | None |
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