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  • Notice of End of Sales for Economy Series Pneumatic Equipment Category. More information.

Vacuum Pad, Standard Small Type, VPMA, Barb Fitting Type (Part Number)

Vacuum Pad, Standard Small Type, VPMA, Barb Fitting Type
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Product Description

Small vacuum pad ideal for use in semiconductor manufacturing equipment. *CAD data currently being revised for this series. This will be available as soon as modifications are complete.

[Features]
· Containers of different shapes are available, including the general type which is ideal for flat work surfaces (ones that are rigid enough not to flap), the deep type ideal for round fruits (apples, etc.) and balls, and the small type ideal for small works and for use at semiconductor manufacturing facilities.
· A wide range of pad sizes, pad materials, and holder shapes are available.
· Pad holders have been added for applications requiring copper-based metal not to be used and as part of efforts to reduce ozone concentrations.
· Copper-based metal is not used for metal parts. HNBR is used for sealing rubber material.

Dimensions

Vacuum Pad, Standard Small Type, VPMA, Barb Fitting Type
Vacuum Pad, Standard Small Type, VPMA, Barb Fitting Type
Vacuum Pad, Standard Small Type, VPMA, Barb Fitting Type
Vacuum Pad, Standard Small Type, VPMA, Barb Fitting Type

Standard table

Model codeTube I.D.
øD
Pad O.D.
ød
Thread
M
BLCHex.
H
Connection
config. code
VPMA0.7RM[5]-3B[9]20.7M4×0.518466-T4
VPMA0.7RM[5]-4B[9]2.5M5×0.51977
VPMA1RM[5]-3B[9]21M4×0.51866
VPMA1RM[5]-4B[9]2.5M5×0.51977
VPMA1.5RM[5]-3B[9]21.5M4×0.51866
VPMA1.5RM[5]-4B[9]2.5M5×0.51977
VPMA2RM[5]-3B[9]22M4×0.51866
VPMA2RM[5]-4B[9]2.5M5×0.51977
VPMA3RM[5]-3B[9]23M4×0.51866
VPMA3RM[5]-4B[9]2.5M5×0.51977
VPMA4RM[5]-3B[9]24M4×0.51866
VPMA4RM[5]-4B[9]2.5M5×0.51977
VPMA6R[5]-3B[9]26M4×0.523766-T8
VPMA6R[5]-4B[9]2.5M5×0.5247
VPMA8R[5]-3B[9]28M4×0.521.55.56
VPMA8R[5]-4B[9]2.5M5×0.522.57
VPMA10R[5]-3B[9]210M6×0.7528868-M4
VPMA10R[5]-4B[9]2.5297
VPMA15R(A)[5]-3B[9]21529(30)9(10)6
VPMA15R(A)[5]-4B[9]2.530(31)7
VPMA20R(A)[5]-4B[9]2.520M10×136.6(37.6)10(11)712-M6
VPMA20R(A)[5]-6B[9]4
VPMA25R(A)[5]-4B[9]2.52537.6(38.6)11(12)
VPMA25R(A)[5]-6B[9]4
VPMA30R(A)[5]-4B[9]2.53037.6(40.6)11(14)
VPMA30R(A)[5]-6B[9]4
VPMA40R(A)[5]-4B[9]2.54040.6(44.1)14(17.5)
VPMA40R(A)[5]-6B[9]4
VPMA50R(A)[5]-4B[9]2.55041.6(44.6)15(18)
VPMA50R(A)[5]-6B[9]4

Units: mm

*Value in ( ) is the dimension of a deep type pad.
*[5]: Replaced with Pad rubber material code. Refer to the catalog for details.
*[9]: Replaced with "-S3" for -S3 spec. (Copper alloy free material for metal parts and FKM or HNBR for sealing parts).
*Pad material N, NE, and G are not suitable for use under ozone environment.
*Tightening torque of a pad holder fixing bulkhead nut is as below.
     ▪Pad dia.: ø0.7~ø8 mm: Thread size M4×0.5 ▶ 1~1.2 N·m, M5×0.5 ▶ 1.5~2 N·m.
     ▪Pad dia.: ø10, ø15 mm ▶ 2~3 N·m.
     ▪Pad dia.: ø20~ø50 mm ▶ 5~7 N·m

Part Number
VPMA15AF-3B
VPMA15AF-4B
VPMA15AG-3B
VPMA15AG-4B
VPMA15AN-3B
VPMA15AN-4B
VPMA15AS-3B
VPMA15AS-4B
VPMA15AU-3B
VPMA15AU-4B
VPMA20AF-4B
VPMA20AF-6B
VPMA20AG-4B
VPMA20AG-6B
VPMA20AN-4B
VPMA20AN-6B
VPMA20AS-4B
VPMA20AS-6B
VPMA20AU-4B
VPMA20AU-6B
VPMA25AF-4B
VPMA25AF-6B
VPMA25AG-4B
VPMA25AG-6B
VPMA25AN-4B
VPMA25AN-6B
VPMA25AS-4B
VPMA25AS-6B
VPMA25AU-4B
VPMA25AU-6B
VPMA30AF-4B
VPMA30AF-6B
VPMA30AG-4B
VPMA30AG-6B
VPMA30AN-4B
VPMA30AN-6B
VPMA30AS-4B
VPMA30AS-6B
VPMA30AU-4B
VPMA30AU-6B
Part NumberPriceMinimum Order Qty.Volume DiscountDays to ShipRoHSPad Shape Mounting Method Rubber Group Material Environment Color Outer Diameter d
(φ)
Height L1
(mm)
Full length B
(mm)
Mount Connection Screw Vacuum Outlet Tube Outer Diameter
(φ)

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  1. 1

Basic Information

Pad Type Standard / Holder Set Material Rubber-based Mounting Fitting Fixed Type
Vacuum Outlet Direction Top Fall Prevention Valve None Direct Attached Filter None
Metal parts material Standard Specifications
X
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